How to SU8

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!!!ALWAYS WORK UNDER THE FUME CUPBOARD WHEN HANDLING SU8 AND ITS ASSORTED CHEMICALS!!! (The following instructions are for SU8-100 and can also be applied to SU8-50. Check with microchem for guidelines for other version of SU8)

(1) Put SU8 in a small beaker (~10ml in total)

(2) Heat ~7ml of SU8


(3) Heat up a hot plate @66°C for 10'(until it's runny).

(4) Calculate 1ml/inch (or 1ml/2cm).

(5) Set the spinner.

(6) Do a manual spread: You have 10 to set the spread from 0 to 500rpm.

(7) Set the spin spread @2500rpm for 30 (or adjust spread as required)

(8) Use a glass syringe to spread (2ml volume would be OK). Keep it in aceton until needed.

Cleaning of substrates / samples should always be done in the fumecupboard. Lab coat, goggles and gloves should be worn at all times.

Useclean glassware, the ultrasonic bath should be ~half full of water, topup with ultrapure water or distilled if required and samples should be placed in clean glassware, just covered in solvent in the bath.

The nitrogen should be on at the bottle and the N2 gun line should be set to 1 bar.

(1) 8 minutes in ethyl lactate (yellow bottle) in the ultrasonic bath.

Dry with the nitrogen gun.

(2) 8 minutes in acetone in the ultrasonic bath.

Do not dry with the nitrogen gun as actetone fumes are to be avoided.

(3) Rinse with methanol then 8 minutes in the ultrasonic bath.

Dry with the nitrogen gun.

(4) 8 minutes in isopropanol (blue bottle) in the ultrasonic bath.

Finally dry the samples and put into a clean beaker. The samples are now clean and ready to use.

Betweenthe stages the beakers should be cleaned. to do this, wash out thebeaker with the same chemicals in order as above and place upside downat the back of the fume cupboard on a tissue to dry. Once dry they canbe used again or put into the glassware cupboard.

Ifthe wash bottles get low/empty, they can be refilled by topping up fromthe main store bottles in the chemical cupboard. bottles should betopped up in the fume cupboard and any spillage wiped off the mainbottle before being put back into the cupboard.

When finished turn off the nitrogen both at the main bottle and at the fume cupboard.