View source for EBSD using JEOL 7100F FEG-SEM

All samples for EBSD must be polished using the procedure outlined [[AM Sample Preparation for SRAS and EBSD| here]] or to a similar quality before EBSD.

They also need to be thoroughly cleaned using the procedure outlined [[How to clean a sample prior to lithography | here]] or similar.

Finally, you could use the plasma cleaner (upstairs in the sample prep room of the NMRC), but the ion cleaning head does a similar job.

Contact Elisabeth Steer <pczeds@exmail.nottingham.ac.uk> if you want to use the plasma cleaner.

Contact Martin Roe <epzmjr@exmail.nottingham.ac.uk> for SEM training.

Contact Nigel Neate <epzncn@exmail.nottingham.ac.uk> for EBSD training.


==Installing the sample==

Check if the sample is in the “Specimen Exchange” position

VENT the specimen exchange chamber

'''Wear latex gloves'''. Open door, place sample in chamber, close the door

(Place the area you want to EBSD closest to the outer edge of the door/closest to you when the door is shut)

EVAC the chamber

==Using the plasma cleaner==

Move ion cleaning head in

Open valve on top of the argon bottle (2-3 turns) to open it, wait 5 seconds and close it

Set voltage, time and hit START

Move ion cleaning head out

==SEM==

Fill the reservoir with liquid nitrogen

'''Wear latex gloves'''. Move sample into chamber using the stick

Wait for chamber vacuum to go down to 10-4

Switch beam '''ON'''

==Mechanical Alignment (Beam)==

Check dynamic focus is off

Apature '''3''' (or 2) 		50μm (or70)		Spot size 8		Filter 3

Set working distance to '''10m'''m

Go to about '''30,000''' mag

Hit ALIGN

Align using the mechanical X and Y nobs on the SEM

==Alignment (Sample)==

Change working distance to '''20mm''' and Spot size '''11'''

Hit ALIGN

Go to about '''2000''' mag

Align using the X and Y nobs on the control panel

Set tilt to '''70deg'''

'''Switch on Dynamic Focus'''

Focus the centre then the top

=EBSD=

Move detector into 180-188 max – '''195 absolute MAX'''

Find your region of interest and close the camera

Recheck focus and dynamic focus


'''Scan image'''

	''Settings''

		Image scan size 1024	( or greater for a better resolution of the background IMAGE ONLY)	

Dwell time 35

✔ SE

☐ BSE

✔ FSE

✔ Auto

✔ Tilt centre


'''Optimise pattern'''

	Binning 4x4

	Gain 15

	Hit Auto exposure

	90% signal strength

✔ Auto background

✔ Static background

Frame average

Check static background (300)


'''Optimise Solver'''

	''Settings''

		No of bands 6 MIN

		Hough resolution 40-60

		MAD as low as possible



'''Acquire Map'''

	Select the area you want to map

		Once the area is selected (based on grain size) pick a suitable step size and time

	''Settings''

		Pick the resolution you want

		✔ Store Patterns

		✔ Beam off after scan

		✔ Acquire post-acquisition image

=Removing the sample=

Retract EBSD detector

Click Specimen Exchange position on the SEM window

Switch Dynamic focus off

'''Wear latex gloves'''. Once the sample has stopped moving used the stick and pull the sample out

VENT the specimen exchange chamber

Open the door, remove the sample from the chamber, close the door

EVAC the chamber