Mask aligner

The mask aligner is fairly easy to use. There is a booklet next to it containing the start up general use and close down procedures. These are outlined here.

Start up

Before using the mask aligner make sure there is sufficient nitrogen in the gas bottle as the mask aligner uses a lot of nitrogen to keep the lamp cool. if the level is below 80 in the bottle consider getting it replaced if you expect to use the aligner for a long time, otherwise it may shutdown during operation.

The nitrogen should be switched on and the pressure set to 3 bars. There is an additional value in the tubing line, behind the spin coater/sputterer which will need to be switched on.

Once the gas is on, the vacuum and compressor should be switched on a the wall.

The vacuum pump is used for both the spin coater and the mask aligner, there is a switch near to the mask aligner that connects the pump to either the mask aligner or the spin coater, make sure the arrow points to the mask aligner you can check it is correct by touching the sample plates - you should feel/hear some suction there.

Next switch the lamp on and hold the ST (strike a spark) button for a few seconds. After a few seconds a slight glow should be visible around the lamp shutter area, this will get brighter as the lamp warms up.

Then switch on the aligner power.

The mask aligner is now ready to use.

Use

flick the head lift switch and then manually lift the head up out of the way. The flick the mask lamp switch and remove the mask collar. place the mask onto the mask holder feature side down. replace the collar and check for good fit. flick the mask clamp switch. manually position the mask until the scan light is illuminated.

mount sample onto the turn table and press the turntable button to move the sample under the mask. when happy with the position, press the red button on the mouse type controller, this will bring the sample and mask into contact and then separate a small amount to allow final adjustments to the sample position, when happy press the red button to bring the the mask and sample into contact again.

bring the head back down and flick the head lift button to lower the head to finial position. (this can be done before the previous step if you need to use the view finder for alignment of the mask and sample)

Everything is now ready for an exposure. Set the time in seconds for the exposure on the dials in the top left (max is 99.9 seconds).

before exposure make sure that everyone in the roon is aware that you are about to expose and they are not looking at the mask aligner, the UV light is not good for your eyes and should not be looked at. Once happy that it is safe, press the expose button.

you will hear the mask aligner move the shutter and expose the sample, after the time is up the shutter will close automatically and the sample will be dropped down out of contact mode. press the turn table button to get access to your sample.

if you have any issues with the aligner the reset button, will stop everything and drop the sample down out of contact mode.

Shut Down

lift the head, flick the mask clamp button and remove the collar and mask. replace the collar. switch off the aligner power, the lamp power, the vacuum and the compressor. Leave the nitrogen on for ~10mins to cool the lamp before shutting off.