Difference between revisions of "Sputter coater"

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To callibrate the sputterer [[FTM]] coat to a nominal thickness then pass the sample to Rod Dykeman who'll scratch the coating and measure it using a Tallystep.
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To calibrate the sputter coater [[FTM]] coat to a nominal thickness then pass the sample to Rod Dykeman who'll scratch the coating and measure it using a Tallystep.
  
If the coating is too hard (eg [[ITO]]) then you'll have to mask out some areas using [[photoresist]] and [[lift off]] to provide an edge.  This might be possible using some dabs of photoresist rather than a spincoated layer and mask exposure.
+
If the coating is too hard (eg [[ITO]]) then you'll have to mask out some areas using [[photoresist]] and [[lift off]] to provide an edge.  This might be possible using some dabs of photoresist rather than a spin-coated layer and mask exposure.
  
  
******* IMPORTANT !!!!
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*IMPORTANT INFORMATION REGARDING THE ID TAG SYSTEM!!!!
An ID card is required to run the sputterer. The tag must be left on the tag reader, on top of the sputterer, while the sputtering is taking place. The tag reader of the sputterer is linked to the computer (sofa), next to the sputterer. In the unlikely event that the computer needs to be restarted, the software that controls the sputterer need to be restarted as well:
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An ID tag is required to run the sputterer. If you are new in the lab and you need to use the sputterer please contact [[Teti Stratoudaki]] or [[Richard Smith]] who can issue a tag for you.
 +
The tag must be left on the tag reader, on top of the sputter coater, while the sputtering is taking place. The tag reader of the sputter coater is linked to the computer (sofa), next to the sputterer. In the unlikely event that the computer needs to be restarted, the software that controls the sputter coater needs to be restarted as well:
 
* cd /sputterer
 
* cd /sputterer
 
* sudo ./run_sputterer_access_control
 
* sudo ./run_sputterer_access_control
 
You will have to provide the password for the computer (sofa) and the sputterer should then be back in working order.
 
You will have to provide the password for the computer (sofa) and the sputterer should then be back in working order.
 +
 +
* CHANGING METAL SOURCES
 +
 +
If you need to change metal sources you need to understand the use of spacers.
 +
There are two kinds of spacers

Revision as of 12:29, 26 October 2012

To calibrate the sputter coater FTM coat to a nominal thickness then pass the sample to Rod Dykeman who'll scratch the coating and measure it using a Tallystep.

If the coating is too hard (eg ITO) then you'll have to mask out some areas using photoresist and lift off to provide an edge. This might be possible using some dabs of photoresist rather than a spin-coated layer and mask exposure.


  • IMPORTANT INFORMATION REGARDING THE ID TAG SYSTEM!!!!

An ID tag is required to run the sputterer. If you are new in the lab and you need to use the sputterer please contact Teti Stratoudaki or Richard Smith who can issue a tag for you. The tag must be left on the tag reader, on top of the sputter coater, while the sputtering is taking place. The tag reader of the sputter coater is linked to the computer (sofa), next to the sputterer. In the unlikely event that the computer needs to be restarted, the software that controls the sputter coater needs to be restarted as well:

  • cd /sputterer
  • sudo ./run_sputterer_access_control

You will have to provide the password for the computer (sofa) and the sputterer should then be back in working order.

  • CHANGING METAL SOURCES

If you need to change metal sources you need to understand the use of spacers. There are two kinds of spacers