Sputter coater

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To calibrate the sputter coater FTM coat to a nominal thickness then pass the sample to Rod Dykeman who'll scratch the coating and measure it using a Tallystep.

If the coating is too hard (eg ITO) then you'll have to mask out some areas using photoresist and lift off to provide an edge. This might be possible using some dabs of photoresist rather than a spin-coated layer and mask exposure.


IMPORTANT INFORMATION REGARDING THE ID TAG SYSTEM!!!! An ID tag is required to run the sputterer. If you are new in the lab and you need to use the sputterer please contact Teti Stratoudaki or Richard Smith who can issue a tag for you. The tag must be left on the tag reader, on top of the sputter coater, while the sputtering is taking place. The tag reader of the sputter coater is linked to the computer (sofa), next to the sputterer. In the unlikely event that the computer needs to be restarted, the software that controls the sputter coater needs to be restarted as well:

  • cd /sputterer
  • sudo ./run_sputterer_access_control

You will have to provide the password for the computer (sofa) and the sputterer should then be back in working order.


If you need to change metal sources you need to understand the use of spacers. There are two kinds of spacers