Photoresist

From Applied Optics Wiki
Revision as of 11:32, 5 May 2010 by Matt (talk | contribs)

(diff) ← Older revision | Latest revision (diff) | Newer revision → (diff)
Jump to: navigation, search

Photoresists are used to coated and pattern substrates. They are normally spincoated and patterned by exposing to UV light in the mask aligner (through a mask).

They come in postive and negative varieties. In a positive resist holes are made in the film where it has been exposed to UV light, in a negative resist holes are made where it hasn't been exposed to UV light.

The following resists are used in the Fab Lab:

PMMA negative

BPO positive